SPUTTERING DEPOSITION SYSTEMS / PLASMA COATERS

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• -HiTUS Sputtering Deposition Systems

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• -Magnetron  Sputtering Deposition Systems

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• -Large Area Sputtering Deposition Systems

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• -Bench Top Coaters

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• -R&D Deposition Systems

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Our network of suppliers, engineers and other fabrication sub-contractors allows us to offer a range of custom sputtering deposition equipment products, from component parts – e.g. frames and panelling, custom chambers, feedthroughs - to full coating machines, using either HiTUS (remote plasma sourced) diode or magnetron sputtering sources.

 

Where customer confidentiality dictates, we are happy to adapt our build and acceptance test regime to supply incompletely equipped but proven safe and functional systems for finishing by the customer.

 

We are able to design with future upgrade in mind, ensuring maximum possible re-use of parts with minimum upgrade cost: where budgets are tight, this allows a phased purchase of the ultimately desired system at little or no added cost and no contractual commitments.

 

S500

Our flagship “S500” sputtering deposition system has formed the basis for many custom variations and is in use with both academic and commercial R&D groups for advanced thin film research and device prototyping. It is a prime example of the range of options we can offer:

 

• HiTUS (remote plasma sourced) high rate deposition

 

• Very high quality coatings

 

• Multi-target capability

 

• Reactive process and co-sputtering options

 

• Software controlled

 

• Recipe driven process option

 

• Substrate stage options – heating, cooling, bias

 

• Internal diagnostics and monitoring - TFM, OES, remote temperature monitoring

 

• Custom chamber options – load/lock